Rose, F, Wang, N, Smith, R et al. (9 more authors) (2014) Complete characterization by Raman spectroscopy of the structural properties of thin hydrogenated diamond-like carbon films exposed to rapid thermal annealing. Journal of Applied Physics, 116 (12). 123516. ISSN 0021-8979
Abstract
We have demonstrated that multi-wavelength Raman and photoluminescence spectroscopies are sufficient to completely characterize the structural properties of ultra-thin hydrogenated diamond-like carbon (DLC:H) films subjected to rapid thermal annealing (RTA, 1 s up to 659 °C) and to resolve the structural differences between films grown by plasma-enhanced chemical vapor deposition, facing target sputtering and filtered cathodic vacuum arc with minute variations in values of mass density, hydrogen content, and sp3 fraction. In order to distinguish unequivocally between films prepared with different density, thickness, and RTA treatment, a new method for analysis of Raman spectra was invented. This newly developed analysis method consisted of plotting the position of the Raman G band of carbon versus its full width at half maximum. Moreover, we studied the passivation of non-radiative recombination centers during RTA by performing measurements of the increase in photoluminescence in conjunction with the analysis of DLC:H networks simulated by molecular dynamics. The results show that dangling bond passivation is primarily a consequence of thermally-induced sp2 clustering rather than hydrogen diffusion in the film.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2014 AIP Publishing LLC. Reproduced in accordance with the publisher's self-archiving policy. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Rose, F, Wang, N, Smith, R, Xiao, Q-F, Inaba, H, Matsumura, T, Saito, Y, Matsumoto, H, Dai, Q, Marchon, B, Mangolini, F and Carpick, RW (2014) Complete characterization by Raman spectroscopy of the structural properties of thin hydrogenated diamond-like carbon films exposed to rapid thermal annealing. Journal of Applied Physics, 116 (12). 123516. ISSN 0021-8979, and may be found at http://dx.doi.org/10.1063/1.4896838 |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Mechanical Engineering (Leeds) > Institute of Functional Surfaces (Leeds) |
Depositing User: | Symplectic Publications |
Date Deposited: | 11 Apr 2016 13:07 |
Last Modified: | 23 Jun 2023 21:55 |
Published Version: | http://dx.doi.org/10.1063/1.4896838 |
Status: | Published |
Publisher: | American Institute of Physics (AIP) |
Identification Number: | 10.1063/1.4896838 |
Related URLs: | |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:91879 |