Ward, MB, Porter, NA, Sinha, P et al. (2 more authors) (2014) Preparation of plan-view Co-doped FeSi thin film TEM specimens using FIB. Journal of Physics: Conference Series, 522 (1). ARTN 012044. ISSN 1742-6588
Abstract
When examining thin films using transmission electron microscopy (TEM), it is usually necessary to image a cross-section of the film (i.e. parallel to the film). However sometimes it is favourable to image thin films in plan-view (i.e. perpendicular to the film). This is the case for Co-doped FeSi thin films, which possess chiral symmetry along certain zone axes. In order to view these zone axes it is necessary to prepare the films in plan-view. There exist various ways to produce plan-view TEM specimens of thin films, such as back etching, ion milling and mechanical polishing. Here, a method using focused ion beam (FIB) is described in detail. Benefits of using FIB are that it is a quick process, there are no limitations in terms of substrate material, and samples can be produced from sections of substrate/film that may be too small to prepare any other way. The effectiveness of the preparation technique is also discussed here, with some preliminary energy dispersive X-ray (EDX) mapping data. © Published under licence by IOP Publishing Ltd.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2013, AIP Publishing Ward, MB, Porter, NA, Sinha, P, Brydson, R and Marrows, CH (2014) Preparation of plan-view Co-doped FeSi thin film TEM specimens using FIB. Journal of Physics: Conference Series, 522 (1). ARTN 012044, used in accordance with the Creative Commons Attribution 3.0 Unported License. |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Chemical & Process Engineering (Leeds) > Institute for Materials Research (Leeds) The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Physics and Astronomy (Leeds) |
Depositing User: | Symplectic Publications |
Date Deposited: | 24 Nov 2014 12:26 |
Last Modified: | 24 Nov 2014 12:56 |
Published Version: | http://dx.doi.org/10.1088/1742-6596/522/1/012044 |
Status: | Published |
Publisher: | Institute of Physics Publishing |
Refereed: | Yes |
Identification Number: | 10.1088/1742-6596/522/1/012044 |
Related URLs: | |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:81330 |