Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms

Doyle, Scott, Gibson, Andrew Robert orcid.org/0000-0002-1082-4359, Boswell, Rod et al. (2 more authors) (2020) Decoupling ion energy and flux in intermediate pressure capacitively coupled plasmas via tailored voltage waveforms. Plasma Sources Science and Technology. 124002. ISSN 0963-0252

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Item Type: Article
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© 2020 IOP Publishing Ltd. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy.
Dates:
  • Published: 16 December 2020
  • Accepted: 6 November 2020
  • Submitted: 12 June 2020
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 20 Aug 2021 10:40
Last Modified: 19 Feb 2025 00:09
Published Version: https://doi.org/10.1088/1361-6595/abc82f
Status: Published
Refereed: Yes
Identification Number: 10.1088/1361-6595/abc82f
Open Archives Initiative ID (OAI ID):

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