Sala, E.M. orcid.org/0000-0001-8116-8830, Bollani, M., Bietti, S. et al. (3 more authors) (2014) Ordered array of Ga droplets on GaAs(001) by local anodic oxidation. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 32 (6). 061206. ISSN 2166-2746
Abstract
The authors present a procedure to obtain uniform, ordered arrays of Ga droplets on GaAs(001) substrates. The growth process relies on an interplay between the substrate patterning, in form of a two dimensional array of nanoholes periodically modulated obtained via local anodic oxidation, and self-assembly of Ga droplets in a molecular beam epitaxy environment. The formation of site controlled Ga droplets, characterized by atomic force microscopy, is the outcome of the combined effects of capillary condensation and nucleation kinetics.
Metadata
| Item Type: | Article |
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| Authors/Creators: |
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| Copyright, Publisher and Additional Information: | © 2014 American Vacuum Society |
| Dates: |
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| Institution: | The University of Sheffield |
| Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) |
| Depositing User: | Symplectic Sheffield |
| Date Deposited: | 28 Nov 2019 17:03 |
| Last Modified: | 28 Nov 2019 17:03 |
| Status: | Published |
| Publisher: | AIP Publishing |
| Refereed: | Yes |
| Identification Number: | 10.1116/1.4901017 |
| Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:154002 |

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