Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films

Abstract

In this paper we describe the scanning electron microscopy techniques of electron backscatter diffraction, electron channeling contrast imaging, wavelength dispersive X-ray spectroscopy, and cathodoluminescence hyperspectral imaging. We present our recent results on the use of these non-destructive techniques to obtain information on the topography, crystal misorientation, defect distributions, composition, doping, and light emission from a range of UV-emitting nitride semiconductor structures. We aim to illustrate the developing capability of each of these techniques for understanding the properties of UV-emitting nitride semiconductors, and the benefits were appropriate, in combining the techniques.

Metadata

Item Type:	Article
Authors/Creators:	Trager-Cowan, C. Alasmari, A. Avis, W. Bruckbauer, J. Edwards, P.R. Hourahine, B. Kraeusel, S. Kusch, G. Johnston, R. Naresh-Kumar, G. Martin, R.W. Nouf-Allehiani, M. Pascal, E. Spasevski, L. Thomson, D. Vespucci, S. Parbrook, P.J. Smith, M.D. Enslin, J. Mehnke, F. Kneissl, M. Kuhn, C. Wernicke, T. Hagedorn, S. Knauer, A. Kueller, V. Walde, S. Weyers, M. Coulon, P.M. Shields, P.A. Zhang, Y. Jiu, L. Gong, Y. Smith, R.M. Wang, T. https://orcid.org/0000-0001-5976-4994 Winkelmann, A.
Copyright, Publisher and Additional Information:	© 2019 The Authors. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License (https://creativecommons.org/licenses/by/4.0/). Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI.
Dates:	Accepted: 28 August 2019 Published: 30 October 2019
Institution:	The University of Sheffield
Academic Units:	The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield)
Funding Information:	Funder Grant number ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCIL (EPSRC) EP/M003132/1 ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCIL (EPSRC) EP/M015181/1 ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCIL (EPSRC) EP/P006973/1
Depositing User:	Symplectic Sheffield
Date Deposited:	18 Nov 2019 13:20
Last Modified:	18 Nov 2019 13:20
Status:	Published
Publisher:	The Optical Society
Refereed:	Yes
Identification Number:	10.1364/prj.7.000b73
Open Archives Initiative ID (OAI ID):	oai:eprints.whiterose.ac.uk:153548

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Scanning electron microscope as a flexible tool for investigating the properties of UV-emitting nitride semiconductor thin films

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