Walther, T. orcid.org/0000-0003-3571-6263 (2019) Measuring grain boundary segregation: tomographic atom probe field ion microscopy (APFIM) vs. analytical scanning transmission electron microscopy (STEM). In: Journal of Physics: Conference Series. 19th International Conference on Extended Defects in Semiconductors (EDS2018), 24-29 Jun 2018, Thessaloniki, Greece. IOP Publishing
Abstract
Grain boundary segregation is an important phenomenon in metallurgy and semiconductor technology. Some recent studies by tomographic atom probe field ion microscopy (APFIM) claim to have measured the interfacial excess of atoms segregated to grain boundaries with ultra-high precision, down to 0.01-0.02 atoms/nm2. This study critically evaluates these claims by simulations. It is shown that atom probe tomography is no 'magic bullet' and suffers similar physical constraints as analytical scanning transmission electron microscopy (STEM). Data analyses from both methods have much in common in terms of geometry, performance, systematic and statistical errors. It is shown that an analysis method previously developed for (S)TEM called conceptEM can also successfully be applied to APFIM data.
Metadata
Item Type: | Proceedings Paper |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © IOP Publishing. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence (https://creativecommons.org/licenses/by/3.0/). Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Published under licence by IOP Publishing Ltd. |
Dates: |
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Institution: | The University of Sheffield |
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) |
Depositing User: | Symplectic Sheffield |
Date Deposited: | 10 Jun 2019 11:26 |
Last Modified: | 11 Jun 2019 15:32 |
Status: | Published |
Publisher: | IOP Publishing |
Refereed: | Yes |
Identification Number: | 10.1088/1742-6596/1190/1/012002 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:146747 |