Chudpooti, N orcid.org/0000-0002-7239-9968, Doychinov, V orcid.org/0000-0001-6730-0057, Akkaraekthalin, P orcid.org/0000-0001-6520-0765 et al. (2 more authors) (2018) Non-Invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films. IEEE Sensors Journal, 18 (8). pp. 3174-3182. ISSN 1530-437X
Abstract
This work presents a low-cost non-invasive millimeter-wave surface-height measurement sensor of dielectric and polymer films on glass and quartz substrates. The surface-height profiler utilizes near-field resonance measurement technique operating at 96 GHz implemented by using a single complementary split-ring resonator (CSRR) integrated with a tailor-made WR10 rectangular waveguide. By placing a glass or quartz substrate uniformly coated with SU-8 photoresist on top of the CSRR, the thickness of the SU-8 polymer can be extracted based on the reflected and transmitted electromagnetic-wave energy interacting at the electrical boundary between the substrate and polymer film. Uniform single layers of SU-8 polymer with thicknesses from 3 to 13 μm, coated on top of glass substrate are measured and characterized. The extracted polymer-film thicknesses from the sensor in this work show an agreement of higher than 95% as compared to the commercial surface profiler instrument, while offering various advantages e.g. non-invasion, ease of measurement setup, low-cost and miniaturization.
Metadata
Item Type: | Article |
---|---|
Authors/Creators: |
|
Copyright, Publisher and Additional Information: | © 2018 IEEE. This is an author produced version of a paper published in IEEE Sensors Journal. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. Uploaded in accordance with the publisher's self-archiving policy. |
Keywords: | non-invasive measurement, millimeter-wave sensor, thickness characterization, SU-8 photoresist, W-band |
Dates: |
|
Institution: | The University of Leeds |
Funding Information: | Funder Grant number EPSRC EP/N010523/1 |
Depositing User: | Symplectic Publications |
Date Deposited: | 05 Feb 2018 16:06 |
Last Modified: | 16 Dec 2024 14:26 |
Status: | Published |
Publisher: | Institute of Electrical and Electronics Engineers |
Identification Number: | 10.1109/JSEN.2018.2806185 |
Related URLs: | |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:126916 |