Win Khun, N, Neville, A, Kolev, I et al. (1 more author) (2016) Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition. Journal of Tribology, 138 (3). 031301. ISSN 0742-4787
Abstract
In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC films were deposited on the steel substrates with a tungsten carbide interlayer via μW-PECVD. The negative substrate bias used during the film deposition was varied. The Raman results revealed that the increased negative substrate bias increased the sp3 bonding in the DLC films as a result of the increased kinetic energy of film-forming ions during the film deposition. The tribological results clearly indicated that the friction and wear of the DLC-coated steel samples against a 100Cr6 steel ball significantly decreased with increased negative substrate bias due to the significantly improved wear resistance of the DLC films.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Keywords: | DLC film, microwave-excited plasma-enhanced CVD, substrate bias, friction, wear |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Mechanical Engineering (Leeds) > Institute of Functional Surfaces (Leeds) |
Depositing User: | Symplectic Publications |
Date Deposited: | 23 Jun 2016 08:33 |
Last Modified: | 03 Nov 2016 09:35 |
Published Version: | http://dx.doi.org/10.1115/1.4031995 |
Status: | Published |
Publisher: | American Society of Mechanical Engineers |
Identification Number: | 10.1115/1.4031995 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:99599 |