Beake, BD, Davies, MI, Liskiewicz, TW et al. (2 more authors) (2013) Nano-scratch, nanoindentation and fretting tests of 5-80 nm ta-C films on Si(1 0 0). Wear, 301 (1-2). 575 - 582. ISSN 0043-1648
Abstract
Wear and stiction forces limit the reliability of Silicon-based micro-systems when mechanical contact occurs. Ultra-thin filtered cathodic vacuum arc (FCVA) ta-C films are being considered as protective overcoats for Si-based MEMS devices. Fretting, nano-scratch and nanoindentation of different thickness (5, 20 and 80 nm) ta-C films deposited on Si(1 0 0) have been performed using spherical indenters to investigate the role of film thickness, tangential loading, contact pressure and deformation mechanism in the different contact situations. The influence of the mechanical properties and phase transformation behaviour of the silicon substrate in determining the tribological performance (critical loads, damage mechanism) of the ta-C film coated samples has been evaluated by comparison with previously published data on uncoated Silicon. The small scale fretting wear occurs at significantly lower contact pressure than is required for plastic deformation and phase transformation in nanoindentation and nano-scratch testing. There is a clear correlation between the fretting and nano-scratch test results despite the differences in contact pressure and failure mechanism in the two tests. In both cases increasing film thickness provides more load support and protection of the Si substrate. Thinner films offer significantly less protection, failing at lower load in the scratch test and more rapidly and/or at lower load in the fretting test.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | (c) 2013, Elsevier. This is an author produced version of a paper published in Wear. Uploaded in accordance with the publisher's self-archiving policy. |
Keywords: | Nanotribology; nano-fretting; ta-C; nanomechanics; MEMS |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Mechanical Engineering (Leeds) |
Depositing User: | Symplectic Publications |
Date Deposited: | 06 May 2015 14:25 |
Last Modified: | 17 Jan 2018 17:40 |
Published Version: | http://dx.doi.org/10.1016/j.wear.2013.01.073 |
Status: | Published |
Publisher: | Elsevier |
Identification Number: | 10.1016/j.wear.2013.01.073 |
Related URLs: | |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:84182 |