Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance

• Sánchez-Arriaga, N.E.
• Canzini, E.
• Espley-Plumb, N.J.
• Farnsworth, M.
• Pope, S.
• Leyland, A.
• Tiwari, A.

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• Accepted: 6 October 2025
• Published (online): 12 November 2025
• Published: 12 November 2025