In-situ full-wafer metrology via coupled white light and monochromatic stroboscopic illumination

Atkinson, J.B.P. orcid.org/0009-0002-6371-1953 and Howse, J.R. orcid.org/0000-0003-1503-2083 (2025) In-situ full-wafer metrology via coupled white light and monochromatic stroboscopic illumination. Optics and Lasers in Engineering, 184 (Part 2). 108692. ISSN 0143-8166

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Item Type: Article
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Crown Copyright © 2024 Published by Elsevier Ltd. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0).

Keywords: Spin-coating; Metrology; Thin film interference; Reflectance; Full-wafer
Dates:
  • Published: January 2025
  • Published (online): 15 November 2024
  • Accepted: 7 November 2024
  • Submitted: 22 March 2024
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Chemical and Biological Engineering (Sheffield)
The University of Sheffield > Faculty of Engineering (Sheffield) > School of Chemical, Materials and Biological Engineering
Depositing User: Symplectic Sheffield
Date Deposited: 17 Mar 2025 14:39
Last Modified: 17 Mar 2025 14:39
Status: Published
Publisher: Elsevier BV
Refereed: Yes
Identification Number: 10.1016/j.optlaseng.2024.108692
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