Alimi, Y. orcid.org/0000-0002-5198-6557, Guilhabert, B. orcid.org/0000-0002-3986-8566, Jevtics, D. orcid.org/0000-0002-6678-8334 et al. (4 more authors) (2025) Micro-transfer printing of InGaAs/InP avalanche photodiode on Si substrate. Semiconductor Science and Technology, 40 (1). 015023. ISSN 0268-1242
Abstract
<jats:title>Abstract</jats:title> <jats:p>We report on the fabrication and micro-transfer printing (<jats:italic>µ</jats:italic>-TP) of InGaAs/InP avalanche photodiodes (APDs) onto silicon substrates. A process flow was developed to suspend the devices using semiconductor tethers. The developed process reduces the number of fabrication steps required compared to methods based on the use of photoresist tethers. Furthermore, our process is compatible with devices that may be susceptible to damage induced by the photoresist removal process. APDs were characterised in linear mode operation both before suspension and after printing. Despite the additional fabrication steps required to suspend the APD membranes and the physical nature of the <jats:italic>µ</jats:italic>-TP process, the electrical characteristics of the devices were preserved. No degradation in the optical performance of the devices was measured. Our work represents the first demonstration of <jats:italic>µ</jats:italic>-TP of InGaAs/InP APDs onto silicon substrates. The results highlight the viability of <jats:italic>µ</jats:italic>-TP for effective heterogeneous integration of InGaAs/InP APDs with silicon photonic integrated circuits for optical and quantum communication and other light detection applications.</jats:p>
Metadata
Item Type: | Article |
---|---|
Authors/Creators: |
|
Copyright, Publisher and Additional Information: | © 2024 The Authors. This is an Open Access article distributed under the terms of the Creative Commons Attribution Licence (https://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. |
Keywords: | 40 Engineering; 4009 Electronics, Sensors and Digital Hardware; 51 Physical Sciences |
Dates: |
|
Institution: | The University of Sheffield |
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > School of Electrical and Electronic Engineering |
Funding Information: | Funder Grant number ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCIL EP/R03480X/1 |
Depositing User: | Symplectic Sheffield |
Date Deposited: | 13 Jan 2025 10:37 |
Last Modified: | 13 Jan 2025 10:37 |
Published Version: | https://doi.org/10.1088/1361-6641/ad9f9b |
Status: | Published |
Publisher: | IOP Publishing |
Refereed: | Yes |
Identification Number: | 10.1088/1361-6641/ad9f9b |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:221289 |
Download
Filename: Alimi_2025_Semicond._Sci._Technol._40_015023.pdf
Licence: CC-BY 4.0