Stencil-Based Selective Surface Functionalization of Silicon Nanowires in 3D Device Architectures for Next-Generation Biochemical Sensors

Ali, Basit, Özkan, Sena Nur, Kerimzade, Umut et al. (5 more authors) (2024) Stencil-Based Selective Surface Functionalization of Silicon Nanowires in 3D Device Architectures for Next-Generation Biochemical Sensors. ACS Applied Nano Materials. pp. 10634-10647. ISSN 2574-0970

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Item Type: Article
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© 2024 American Chemical Society. This is an author-produced version of the published paper. Uploaded in accordance with the University’s Research Publications and Open Access policy.

Keywords: 3D MEMS devices,extracellular matrix,heparin,silicon nanowire,stencil lithography,surface functionalization
Dates:
  • Accepted: 15 April 2024
  • Published (online): 2 May 2024
  • Published: 10 May 2024
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Electronic Engineering (York)
Depositing User: Pure (York)
Date Deposited: 30 Jul 2024 13:10
Last Modified: 02 Apr 2025 23:28
Published Version: https://doi.org/10.1021/acsanm.4c01065
Status: Published
Refereed: Yes
Identification Number: 10.1021/acsanm.4c01065
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