Sala, E.M. orcid.org/0000-0001-8116-8830, Bollani, M., Bietti, S. et al. (3 more authors) (2014) Ordered array of Ga droplets on GaAs(001) by local anodic oxidation. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 32 (6). 061206. ISSN 2166-2746
Abstract
The authors present a procedure to obtain uniform, ordered arrays of Ga droplets on GaAs(001) substrates. The growth process relies on an interplay between the substrate patterning, in form of a two dimensional array of nanoholes periodically modulated obtained via local anodic oxidation, and self-assembly of Ga droplets in a molecular beam epitaxy environment. The formation of site controlled Ga droplets, characterized by atomic force microscopy, is the outcome of the combined effects of capillary condensation and nucleation kinetics.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2014 American Vacuum Society |
Dates: |
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Institution: | The University of Sheffield |
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) |
Depositing User: | Symplectic Sheffield |
Date Deposited: | 28 Nov 2019 17:03 |
Last Modified: | 28 Nov 2019 17:03 |
Status: | Published |
Publisher: | AIP Publishing |
Refereed: | Yes |
Identification Number: | 10.1116/1.4901017 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:154002 |