Chudpooti, N, Chudpooti, S, Akkaraekthalin, P et al. (2 more authors) (2020) 96-GHz Complementary Split Ring Resonator for Thin Photoresist Film Thickness Characterization. In: 2019 Research, Invention, and Innovation Congress (RI2C). 2019 Research, Invention, and Innovation Congress (RI2C 2019), 11-13 Dec 2019, Bangkok, Thailand. IEEE ISBN 978-1-7281-4101-5
Abstract
Non-destructive thickness measurement offers a valuable feature for thin polymer-based applications in both industrial and medical utilization. Herein, we developed a novel, non-destructive, millimetre-wave WR-10 waveguide sensor for measuring a dielectric film layer on a transparent substrate. Complementary split-ring resonator (CSRR) was integrated on top of a customized WR10 waveguide and operated at 96 GHz. The thickness of the SU-8 layers, ranging from 3-13 μm, coated on a glass substrate was then examined using the resonant frequency shift. The thickness values obtained from this novel sensor strongly resemble the values obtained from standard surface profiler measurement method, with less than 5 % difference. Thus, our novel design offers a comparable accuracy with a better cost effectiveness when compare with an existing commercial instrument.
Metadata
Item Type: | Proceedings Paper |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | ©2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
Keywords: | Non-destructive measurement, millimeter-wave sensor, SU-8 photoresist, tailor-made W-band waveguide, thickness characterization |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds) The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Robotics, Autonomous Systems & Sensing (Leeds) |
Funding Information: | Funder Grant number EPSRC (Engineering and Physical Sciences Research Council) EP/N010523/1 |
Depositing User: | Symplectic Publications |
Date Deposited: | 14 Oct 2019 10:22 |
Last Modified: | 16 Dec 2020 16:08 |
Status: | Published |
Publisher: | IEEE |
Identification Number: | 10.1109/RI2C48728.2019.8999896 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:152075 |