96-GHz Complementary Split Ring Resonator for Thin Photoresist Film Thickness Characterization

Chudpooti, N, Chudpooti, S, Akkaraekthalin, P et al. (2 more authors) (2020) 96-GHz Complementary Split Ring Resonator for Thin Photoresist Film Thickness Characterization. In: 2019 Research, Invention, and Innovation Congress (RI2C). 2019 Research, Invention, and Innovation Congress (RI2C 2019), 11-13 Dec 2019, Bangkok, Thailand. IEEE ISBN 978-1-7281-4101-5

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Item Type: Proceedings Paper
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Keywords: Non-destructive measurement, millimeter-wave sensor, SU-8 photoresist, tailor-made W-band waveguide, thickness characterization
Dates:
  • Published: 17 February 2020
  • Published (online): 17 February 2020
  • Accepted: 7 October 2019
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds)
The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Robotics, Autonomous Systems & Sensing (Leeds)
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Funder
Grant number
EPSRC (Engineering and Physical Sciences Research Council)
EP/N010523/1
Depositing User: Symplectic Publications
Date Deposited: 14 Oct 2019 10:22
Last Modified: 16 Dec 2020 16:08
Status: Published
Publisher: IEEE
Identification Number: 10.1109/RI2C48728.2019.8999896
Open Archives Initiative ID (OAI ID):

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