Wideband Dielectric Properties of Silicon and Glass Substrates for Terahertz Integrated Circuits and Microsystems

Chudpooti, N, Duangrit, N, Burnett, AD orcid.org/0000-0003-2175-1893 et al. (8 more authors) (2021) Wideband Dielectric Properties of Silicon and Glass Substrates for Terahertz Integrated Circuits and Microsystems. Materials Research Express, 8 (5). 056201. ISSN 2053-1591

Abstract

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Authors/Creators:
Copyright, Publisher and Additional Information: © 2021 The Author(s). Published by IOP Publishing Ltd. Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Keywords: : THz time-domain spectroscopy, material characterization, dielectric properties, electrical properties
Dates:
  • Published: 26 May 2021
  • Accepted: 9 April 2021
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Chemistry (Leeds) > Physical Chemistry (Leeds)
The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds)
The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Robotics, Autonomous Systems & Sensing (Leeds)
Funding Information:
FunderGrant number
EPSRC (Engineering and Physical Sciences Research Council)EP/N010523/1
EPSRC (Engineering and Physical Sciences Research Council)EP/S016813/1
EPSRC (Engineering and Physical Sciences Research Council)EP/P007449/1
EPSRC (Engineering and Physical Sciences Research Council)EP/P021859/1
Depositing User: Symplectic Publications
Date Deposited: 31 Mar 2021 15:12
Last Modified: 16 Aug 2021 15:17
Status: Published
Publisher: IOP Publishing
Identification Number: https://doi.org/10.1088/2053-1591/abf684

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