Jia, S., Le Boulbar, E.D., Balram, K.C. et al. (5 more authors) (2019) Waveguide integrated GaN distributed Bragg reflector cavity using low-cost nanolithography. Micro & Nano Letters, 14 (13). pp. 1322-1327.
Abstract
This work presents the design, fabrication and measurement of gallium nitride (GaN) distributed Bragg reflector cavities integrated with input and output grating couplers. The devices are fabricated using a new, low-cost nanolithography technique: displacement Talbot lithography combined with direct laser writing lithography. The finite-difference time-domain method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.
Metadata
Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2019 The Institution of Engineering and Technology. | ||||
Dates: |
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Institution: | The University of Sheffield | ||||
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) | ||||
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Depositing User: | Symplectic Sheffield | ||||
Date Deposited: | 18 Nov 2019 10:54 | ||||
Last Modified: | 18 Nov 2019 10:54 | ||||
Status: | Published | ||||
Publisher: | Institution of Engineering and Technology (IET) | ||||
Refereed: | Yes | ||||
Identification Number: | https://doi.org/10.1049/mnl.2019.0366 |