96-GHz Complementary Split Ring Resonator for Thin Photoresist Film Thickness Characterization

Chudpooti, N, Chudpooti, S, Akkaraekthalin, P et al. (2 more authors) (2020) 96-GHz Complementary Split Ring Resonator for Thin Photoresist Film Thickness Characterization. In: 2019 Research, Invention, and Innovation Congress (RI2C). 2019 Research, Invention, and Innovation Congress (RI2C 2019), 11-13 Dec 2019, Bangkok, Thailand. IEEE . ISBN 978-1-7281-4101-5

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Copyright, Publisher and Additional Information: ©2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Keywords: Non-destructive measurement, millimeter-wave sensor, SU-8 photoresist, tailor-made W-band waveguide, thickness characterization
Dates:
  • Published: 17 February 2020
  • Accepted: 7 October 2019
  • Published (online): 17 February 2020
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds)
The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Robotics, Autonomous Systems & Sensing (Leeds)
Funding Information:
FunderGrant number
EPSRC (Engineering and Physical Sciences Research Council)EP/N010523/1
Depositing User: Symplectic Publications
Date Deposited: 14 Oct 2019 10:22
Last Modified: 16 Dec 2020 16:08
Status: Published
Publisher: IEEE
Identification Number: https://doi.org/10.1109/RI2C48728.2019.8999896

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