Non-Invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films

Chudpooti, N, Doychinov, V orcid.org/0000-0001-6730-0057, Akkaraekthalin, P et al. (2 more authors) (2018) Non-Invasive Millimeter-Wave Profiler for Surface Height Measurement of Photoresist Films. IEEE Sensors Journal, 18 (8). pp. 3174-3182. ISSN 1530-437X

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Copyright, Publisher and Additional Information: © 2018 IEEE. This is an author produced version of a paper published in IEEE Sensors Journal. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. Uploaded in accordance with the publisher's self-archiving policy.
Keywords: non-invasive measurement, millimeter-wave sensor, thickness characterization, SU-8 photoresist, W-band
Dates:
  • Published: 14 February 2018
  • Accepted: 31 January 2018
Institution: The University of Leeds
Funding Information:
FunderGrant number
EPSRCEP/N010523/1
Depositing User: Symplectic Publications
Date Deposited: 05 Feb 2018 16:06
Last Modified: 24 Apr 2018 16:37
Status: Published
Publisher: Institute of Electrical and Electronics Engineers
Identification Number: https://doi.org/10.1109/JSEN.2018.2806185
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