Items where authors include "Yang, DX"

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Yang, DX, Frommhold, A, McClelland, A et al. (6 more authors) (2016) Performance of a high resolution chemically amplified electron beam resist at various beam energies. Microelectronic Engineering, 155. pp. 97-101. ISSN 0167-9317

This list was generated on Mon Apr 22 01:12:17 2024 BST.