Items where authors include "Marcadal, C."

Article

Kröger, R., Eizenberg, M., Marcadal, C. et al. (1 more author) (2002) Plasma induced microstructural, compositional, and resistivity changes in ultrathin chemical vapor deposited titanium nitride films. Journal of Applied Physics, 91 (8). pp. 5149-5154. ISSN 0021-8979