Items where authors include "Koepke, M"

Article

Brandt, S, Berger, B, Schüngel, E et al. (11 more authors) (2016) Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4. Plasma sources science & technology. 045015. pp. 1-17. ISSN 0963-0252