Items where authors include "Klein, Juergen"

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Article

Wagenaars, Erik orcid.org/0000-0002-5493-3434, Kuepper, Felix, Klein, Juergen et al. (5 more authors) (2008) Power scaling of an extreme ultraviolet light source for future lithography. Applied Physics Letters. 181501. pp. 1-3. ISSN 0003-6951

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