Items where authors include "Bhuva, Montu"

Article

Bhuva, Montu, Daly, Greg, Hassall, Geoff et al. (3 more authors) (2026) Increasing the spatial uniformity of SiO2 films produced by plasma enhanced chemical vapor deposition using capacitively coupled plasmas with structured electrodes. Journal of vacuum science & technology a-Vacuum surfaces and films. 023008. ISSN 0734-2101