Yang, DX, Frommhold, A, McClelland, A et al. (6 more authors) (2016) Performance of a high resolution chemically amplified electron beam resist at various beam energies. Microelectronic Engineering, 155. pp. 97-101. ISSN 0167-9317
Abstract
A novel negative tone molecular resist molecule featuring a tert-butyloxycarbonyl protected phenol malonate group bonded to a 1,8-Diazabicycloundece-7-ene is presented. The resist shows high-resolution capability in electron beam lithography at a range of beam energies. The resist demonstrated a sensitivity of 18.7 μC/cm2 at 20 kV. Dense features with a line width of 15 nm have been demonstrated at 30 kV, whilst a feature size of 12.5 nm was achieved for dense lines at 100 kV.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | (c) 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/). |
Keywords: | electron beam lithography; molecular resist; chemically amplification; electron beam energy |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Institute of Communication & Power Networks (Leeds) The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds) |
Depositing User: | Symplectic Publications |
Date Deposited: | 29 Apr 2016 09:54 |
Last Modified: | 01 Apr 2018 07:35 |
Published Version: | http://dx.doi.org/10.1016/j.mee.2016.03.010 |
Status: | Published |
Publisher: | Elsevier |
Identification Number: | 10.1016/j.mee.2016.03.010 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:99071 |