Oberhammer, J, Shah, U, Baghchehsaraei, Z et al. (4 more authors) (2013) Monocrystalline-Silicon Microwave MEMS. In: UNSPECIFIED Progress in Electromagnetics Research Symposium PIERS 2013, 12-15 Aug 2013, Stockholm, Sweden. The Electromagnetics Academy , 1933 - 1941.
Abstract
This paper gives an overview of recent achievements in microwave micro-electrome chanical systems (microwave MEMS) at KTH Royal Institute of Technology, Stockholm, Sweden. The Ørst topic is a micromachined W-band phase shifter based on a micromachined dielectric block which is vertically moved by integrated MEMS actuators to achieve a tuning of the prop- agation constant of a micromachined transmission line. The second topic is W-band MEMS- tuneable microwave high-impedance metamaterial surfaces conceptualized for local tuning of the electromagnetic resonance properties of surface waves on a high-impedance surface. The third topic covers 3-dimensional micromachined coplanar transmission lines with integrated MEMS actuators which move the sidewalls of these transmission lines. Multi-stable switches, tuneable capacitors, tuneable couplers, and tuneable Ølters have been implemented and characterized for 1{40GHz frequencies. As a forth topic, micromachined waveguide switches are presented. Fi- nally, silicon-micromachined near-Øeld and far-Øeld sensor and antenna interfaces are shown, including a micromachined planar lens antenna and a tapered dielectric rod measurement probe for medical applications.
Metadata
Item Type: | Proceedings Paper |
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Authors/Creators: |
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Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds) |
Depositing User: | Symplectic Publications |
Date Deposited: | 23 Oct 2014 11:42 |
Last Modified: | 19 Dec 2022 13:28 |
Published Version: | http://www.piers.org/piersproceedings/piers2013Sto... |
Status: | Published |
Publisher: | The Electromagnetics Academy |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:80535 |