Elsaadi, M., Tayel, M.B. and Steenson, D.P. (2021) An Empirical Formula of Fringing Field Capacitance for MEMS Tunable Capacitor Actuators. In: 2021 IEEE 1st International Maghreb Meeting of the Conference on Sciences and Techniques of Automatic Control and Computer Engineering MI-STA. 2021 IEEE 1st International Maghreb Meeting of the Conference on Sciences and Techniques of Automatic Control and Computer Engineering MI-STA, 25-27 May 2021, Tripoli, Libya. IEEE , pp. 674-678. ISBN 978-1-6654-4816-1
Abstract
The structural dimensions of MEMS actuators are comparable to the gap separating the electrodes, and this in-turn implies significant fringing field capacitance which should be considered when computing the actual electrostatic force. A number of different formulae have been presented in the literature to account for such effects; however this work aims to summarise these analytical models and to find an empirical formula to simplify the computation of the fringing field induced effect on the electrostatic force actuation.
Metadata
| Item Type: | Proceedings Paper |
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| Authors/Creators: |
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| Keywords: | fringing field effect; sidewall field; modelling of electrostatic MEMS; tunable capacitor; MEMS Actuators |
| Dates: |
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| Institution: | The University of Leeds |
| Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) |
| Depositing User: | Symplectic Publications |
| Date Deposited: | 25 Feb 2025 15:42 |
| Last Modified: | 25 Feb 2025 15:42 |
| Status: | Published |
| Publisher: | IEEE |
| Identification Number: | 10.1109/mi-sta52233.2021.9464509 |
| Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:223677 |
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