On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures

Sahoo, Pankaj, Coates, Eve, Silver, Callum et al. (2 more authors) (2024) On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures. Scientific Reports. p. 8703. ISSN 2045-2322

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Item Type: Article
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© The Author(s) 2024

Dates:
  • Published: 15 April 2024
  • Accepted: 3 April 2024
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 23 Jan 2025 16:50
Last Modified: 13 Mar 2025 05:32
Published Version: https://doi.org/10.1038/s41598-024-58842-w
Status: Published
Refereed: Yes
Identification Number: 10.1038/s41598-024-58842-w
Open Archives Initiative ID (OAI ID):

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Filename: s41598-024-58842-w.pdf

Description: On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures

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