Local droplet etching with indium droplets on InP(100) by metal–organic vapor phase epitaxy

Sala, E.M. orcid.org/0000-0001-8116-8830, In Na, Y. and Heffernan, J. (2024) Local droplet etching with indium droplets on InP(100) by metal–organic vapor phase epitaxy. Crystal Growth & Design, 24 (22). pp. 9571-9580. ISSN 1528-7483

Abstract

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Item Type: Article
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© 2024 The Authors. This is an Open Access article distributed under the terms of the Creative Commons Attribution Licence (https://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Keywords: Arsenic; Etching; Indium; Layers; Liquids
Dates:
  • Published: 20 November 2024
  • Published (online): 6 November 2024
  • Accepted: 29 October 2024
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > School of Electrical and Electronic Engineering
Funding Information:
Funder
Grant number
ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCIL
EP/R03480X/1
Depositing User: Symplectic Sheffield
Date Deposited: 26 Nov 2024 16:07
Last Modified: 05 Mar 2025 11:58
Published Version: http://dx.doi.org/10.1021/acs.cgd.4c01097
Status: Published
Publisher: American Chemical Society (ACS)
Refereed: Yes
Identification Number: 10.1021/acs.cgd.4c01097
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