Lin, Z. orcid.org/0009-0005-0064-5639, Wang, Y. orcid.org/0009-0001-8949-3838, Wang, Y.-R. orcid.org/0000-0001-8497-5902 et al. (2 more authors) (2024) Photonic crystal enhanced light emitting diodes fabricated by single pulse laser interference lithography. Journal of Applied Physics, 136. 123104. ISSN 0021-8979
Abstract
Integration of photonic crystal (PhC) configurations onto the surfaces of light-emitting diodes (LEDs) can play an important role in enhancing light extraction efficiency. While the literature is rich with various PhC fabrication approaches, there is a need for high throughput methods that are appropriate for low-cost devices. In this paper, we report the use of single pulse laser interference lithography (LIL) for the fabrication of photonic crystal structures on LEDs. The use of brief nanosecond pulse exposures offers significant benefits for high-throughput production. In our study, we have applied single pulse LIL on GaAs/AlGaAs LED structures to achieve high-quality photoresist arrays and then have used inductively coupled plasma etching to create nanoholes into the epitaxial structure. The resulting array forms an effective PhC, controlling surface transmission. Electroluminescence (EL) analyses confirm that these structures enhance the average EL intensity of the LED by up to 3.5 times at room temperature. This empirical evidence underscores the efficacy and potential of this fabrication approach in advancing the functional capabilities of semiconductor-based light-emitting devices.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2024 The Authors. This is an Open Access article distributed under the terms of the Creative Commons Attribution Licence (https://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. |
Keywords: | Electrical properties and parameters; Laser interference lithography; Finite difference methods; Nanomaterials; Electroluminescence; Light emitting diodes; Light sensitive materials; Quantum wells; Photonic crystals; Inductively coupled plasma |
Dates: |
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Institution: | The University of Sheffield |
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > School of Electrical and Electronic Engineering |
Funding Information: | Funder Grant number ENGINEERING AND PHYSICAL SCIENCE RESEARCH COUNCIL EP/X016838/1 |
Depositing User: | Symplectic Sheffield |
Date Deposited: | 11 Oct 2024 09:24 |
Last Modified: | 11 Oct 2024 09:24 |
Published Version: | http://dx.doi.org/10.1063/5.0215529 |
Status: | Published |
Publisher: | AIP Publishing |
Refereed: | Yes |
Identification Number: | 10.1063/5.0215529 |
Related URLs: | |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:218178 |