Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas

Osca Engelbrecht, Michel, Jenderny, Jonathan, Hylla, Henrik et al. (5 more authors) (2024) Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas. Plasma Sources Science and Technology. ISSN 0963-0252

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Item Type: Article
Authors/Creators:
Dates:
  • Published: 23 September 2024
  • Accepted: 16 August 2024
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 20 Aug 2024 16:00
Last Modified: 09 Jan 2025 00:12
Published Version: https://doi.org/10.1088/1361-6595/ad7059
Status: Published
Refereed: Yes
Identification Number: 10.1088/1361-6595/ad7059
Open Archives Initiative ID (OAI ID):

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