Osca Engelbrecht, Michel, Ridgers, Christopher Paul orcid.org/0000-0002-4078-0887, Dedrick, James Peter orcid.org/0000-0003-4353-104X et al. (1 more author) (2023) Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating. Plasma Sources Science and Technology. 125003. ISSN 0963-0252
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2023 The Author(s) |
Dates: |
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Institution: | The University of York |
Academic Units: | The University of York > Faculty of Sciences (York) > Physics (York) |
Depositing User: | Pure (York) |
Date Deposited: | 18 Jan 2024 09:00 |
Last Modified: | 07 Dec 2024 00:24 |
Published Version: | https://doi.org/10.1088/1361-6595/ad0fb1 |
Status: | Published |
Refereed: | Yes |
Identification Number: | 10.1088/1361-6595/ad0fb1 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:207957 |
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Description: Particle-in-cell simulations of high frequency capacitively coupled plasmas including spatially localised inductive-like heating
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