Androvitsaneas, P. orcid.org/0000-0001-5013-0282, Clark, R.N. orcid.org/0000-0002-6623-1499, Jordan, M. orcid.org/0009-0000-3521-8884 et al. (9 more authors) (2023) Direct-write projection lithography of quantum dot micropillar single photon sources. Applied Physics Letters, 123 (9). 094001. ISSN 0003-6951
Abstract
We have developed a process to mass-produce quantum dot micropillar cavities using direct-write lithography. This technique allows us to achieve mass patterning of high-aspect ratio pillars with vertical, smooth sidewalls maintaining a high quality factor for diameters below 2.0 μm. Encapsulating the cavities in a thin layer of oxide (Ta2O5) prevents oxidation in the atmosphere, preserving the optical properties of the cavity over months of ambient exposure. We confirm that single dots in the cavities can be deterministically excited to create high-purity indistinguishable single photons with interference visibility 0.9416 +-0.008.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
Keywords: | Excitons; Electrical properties and parameters; Quantum dots; Scanning electron microscopy; Photoluminescence spectroscopy; Optical fibers; Optical reflectors; Photons; Microphotonics; Quantum information |
Dates: |
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Institution: | The University of Sheffield |
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) |
Depositing User: | Symplectic Sheffield |
Date Deposited: | 27 Nov 2023 15:35 |
Last Modified: | 27 Nov 2023 15:35 |
Status: | Published |
Publisher: | AIP Publishing |
Refereed: | Yes |
Identification Number: | 10.1063/5.0155968 |
Related URLs: | |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:205734 |