A spectroscopic reflectance-based low-cost thickness measurement system for thin films: development and testing

Sánchez-Arriaga, N.E. orcid.org/0000-0002-3251-4116, Tiwari, D., Hutabarat, W. orcid.org/0000-0001-7393-7695 et al. (2 more authors) (2023) A spectroscopic reflectance-based low-cost thickness measurement system for thin films: development and testing. Sensors, 23 (11). 5326. ISSN 1424-8220

Abstract

Metadata

Item Type: Article
Authors/Creators:
Copyright, Publisher and Additional Information:

© 2023 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Keywords: Arduino; Python; microprocessor; reflectometry; sensor; thickness measurements; thin film; Spectrum Analysis
Dates:
  • Published: 4 June 2023
  • Published (online): 4 June 2023
  • Accepted: 31 May 2023
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Materials Science and Engineering (Sheffield)
The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Automatic Control and Systems Engineering (Sheffield)
Funding Information:
Funder
Grant number
Engineering and Physical Sciences Research Council
EP/T024607/1
Engineering and Physical Sciences Research Council
EP/S036180/1
Depositing User: Symplectic Sheffield
Date Deposited: 26 Jun 2023 11:39
Last Modified: 26 Jun 2023 11:39
Published Version: http://dx.doi.org/10.3390/s23115326
Status: Published
Publisher: MDPI AG
Refereed: Yes
Identification Number: 10.3390/s23115326
Related URLs:
Open Archives Initiative ID (OAI ID):

Export

Statistics