Two‐inch wafer‐scale exfoliation of hexagonal boron nitride films fabricated by RF‐sputtering

Li, Q., Wang, M., Bai, Y. et al. (9 more authors) (2022) Two‐inch wafer‐scale exfoliation of hexagonal boron nitride films fabricated by RF‐sputtering. Advanced Functional Materials, 32 (38). 2206094. ISSN 1616-301X

Abstract

Metadata

Item Type: Article
Authors/Creators:
Copyright, Publisher and Additional Information:

© 2022 Wiley-VCH GmbH.

Dates:
  • Published: 19 September 2022
  • Published (online): 10 July 2022
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield)
Funding Information:
Funder
Grant number
Engineering and Physical Sciences Research Council
EP/P006973/1; EP/W003244/1; EP/T013001/1
Depositing User: Symplectic Sheffield
Date Deposited: 12 Jul 2022 07:52
Last Modified: 03 Feb 2023 14:43
Status: Published
Publisher: Wiley
Refereed: Yes
Identification Number: 10.1002/adfm.202206094
Open Archives Initiative ID (OAI ID):

Download not available

A full text copy of this item is not currently available from White Rose Research Online

Export

Statistics