Xu, Lei, Xi, Jingqian, Gao, Lu et al. (9 more authors) (2022) A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation. Journal of Microelectromechanical Systems. ISSN 1941-0158
Metadata
Item Type: | Article |
---|---|
Authors/Creators: |
|
Dates: |
|
Institution: | The University of York |
Academic Units: | The University of York > Faculty of Sciences (York) > Electronic Engineering (York) |
Depositing User: | Pure (York) |
Date Deposited: | 14 Jun 2022 10:10 |
Last Modified: | 02 Apr 2025 23:24 |
Published Version: | https://doi.org/10.1109/JMEMS.2022.3183021 |
Status: | Published |
Refereed: | Yes |
Identification Number: | 10.1109/JMEMS.2022.3183021 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:187966 |
Download
Filename: SideBandExcitation_withHighlight_thirdround_.pdf
Description: SideBandExcitation_withHighlight_thirdround