A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation

Xu, Lei, Xi, Jingqian, Gao, Lu et al. (9 more authors) (2022) A Closed-loop System for Resonant MEMS Sensors Subject to Blue-sideband Excitation. Journal of Microelectromechanical Systems. ISSN: 1941-0158

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Item Type: Article
Authors/Creators:
Dates:
  • Accepted: 9 June 2022
  • Published: 22 June 2022
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Electronic Engineering (York)
Depositing User: Pure (York)
Date Deposited: 14 Jun 2022 10:10
Last Modified: 17 Sep 2025 03:00
Published Version: https://doi.org/10.1109/JMEMS.2022.3183021
Status: Published
Refereed: Yes
Identification Number: 10.1109/JMEMS.2022.3183021
Open Archives Initiative ID (OAI ID):

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Filename: SideBandExcitation_withHighlight_thirdround_.pdf

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