Measurement of nanometre-scale gate oxide thicknesses by energy-dispersive X-ray spectroscopy in a scanning electron microscope combined with Monte Carlo simulations

Walther, T. orcid.org/0000-0003-3571-6263 (2021) Measurement of nanometre-scale gate oxide thicknesses by energy-dispersive X-ray spectroscopy in a scanning electron microscope combined with Monte Carlo simulations. Nanomaterials, 11 (8). 2117. ISSN 2079-4991

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Item Type: Article
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© 2021 by the author. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).

Keywords: energy-dispersive X-ray spectroscopy (EDXS); scanning electron microscopy (SEM); penetration depth; oxide thickness; gate oxides
Dates:
  • Published: 20 August 2021
  • Published (online): 20 August 2021
  • Accepted: 17 August 2021
Institution: The University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield)
Depositing User: Symplectic Sheffield
Date Deposited: 20 Aug 2021 10:58
Last Modified: 20 Aug 2021 11:19
Published Version: https://www.mdpi.com/2079-4991/11/8/2117
Status: Published
Publisher: MDPI AG
Refereed: Yes
Identification Number: 10.3390/nano11082117
Open Archives Initiative ID (OAI ID):

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