Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope

Trager-Cowan, C., Alasmari, A., Avis, W. et al. (34 more authors) (2020) Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope. In: IOP Conference Series: Materials Science and Engineering. 16th European Workshop on Modern Developments and Applications in Microbeam Analysis, 19-23 May 2019, Trondheim, Norway. IOP Publishing

Abstract

In this article we describe the scanning electron microscopy (SEM) techniques of electron channelling contrast imaging and electron backscatter diffraction. These techniques provide information on crystal structure, crystal misorientation, grain boundaries, strain and structural defects on length scales from tens of nanometres to tens of micrometres. Here we report on the imaging and analysis of dislocations and sub-grains in nitride semiconductor thin films (GaN and AlN) and tungsten carbide-cobalt (WC-Co) hard metals. Our aim is to illustrate the capability of these techniques for investigating structural defects in the SEM and the benefits of combining these diffraction-based imaging techniques.

Metadata

Item Type:	Proceedings Paper
Authors/Creators:	Trager-Cowan, C. Alasmari, A. Avis, W. Bruckbauer, J. Edwards, P.R. Hourahine, B. Kraeusel, S. Kusch, G. Jablon, B.M. Johnston, R. Martin, R.W. Mcdermott, R. Naresh-Kumar, G. Nouf-Allehiani, M. Pascal, E. Thomson, D. Vespucci, S. Mingard, K. Parbrook, P.J. Smith, M.D. Enslin, J. Mehnke, F. Kneissl, M. Kuhn, C. Wernicke, T. Knauer, A. Hagedorn, S. Walde, S. Weyers, M. Coulon, P.-M. Shields, P.A. Zhang, Y. Jiu, L. Gong, Y. Smith, R.M. Wang, T. https://orcid.org/0000-0001-5976-4994 Winkelmann, A.
Copyright, Publisher and Additional Information:	© 2020 The Authors. Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. See: http://creativecommons.org/licenses/by/3.0.
Dates:	Accepted: 3 July 2020 Published (online): 6 August 2020 Published: 5 August 2020
Institution:	The University of Sheffield
Academic Units:	The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield)
Funding Information:	Funder Grant number Engineering and Physical Science Research Council EP/M015181/1; EP/P006361/1
Depositing User:	Symplectic Sheffield
Date Deposited:	13 Aug 2020 07:22
Last Modified:	13 Aug 2020 09:49
Status:	Published
Publisher:	IOP Publishing
Refereed:	Yes
Identification Number:	10.1088/1757-899x/891/1/012023
Open Archives Initiative ID (OAI ID):	oai:eprints.whiterose.ac.uk:164366

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Advances in electron channelling contrast imaging and electron backscatter diffraction for imaging and analysis of structural defects in the scanning electron microscope

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