Ashkar, R., Dalgliesh, R.M., Pynn, R. et al. (3 more authors) (2020) Profile retrieval of a buried periodic structure using spin echo grazing incidence neutron scattering. Applied Physics Letters, 116 (10). 101602. ISSN 0003-6951
Abstract
When the neutron scattering technique, Spin Echo Resolved Grazing Incidence Scattering (SERGIS) concept, was originally put forward by Rekveldt [Physica B 1135, 234–236 (1997)] and Felcher et al. [Proc. SPIE 4785, 164 (2002)], they recognized that the specular scattering and the off-specular scattering could be spatially separated due to the tight neutron beam collimation in the scattering plane, a necessity for any reflectometry experiment. In this Letter, we show that it is possible to make large area measurements of periodic grating structures using SERGIS in a number of interesting scenarios. The SERGIS data can be analyzed using a dynamical theory, which makes it possible to effectively retrieve the lateral profile of a commercial periodic diffraction grating. Interestingly, this is still the case even when that grating is buried beneath a highly deuterated poly(methyl methacrylate-D8) polymer layer. We also clearly demonstrate that the maximum sensitivity to lateral structures is achieved when the specular reflection from the grating is excluded from the data analysis, demonstrating a feature of SERGIS that was proposed over two decades ago.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2020 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
Dates: |
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Institution: | The University of Sheffield |
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Chemical and Biological Engineering (Sheffield) The University of Sheffield > Faculty of Science (Sheffield) > Department of Physics and Astronomy (Sheffield) |
Funding Information: | Funder Grant number Engineering and Physical Sciences Research Council EP/E046215/1 |
Depositing User: | Symplectic Sheffield |
Date Deposited: | 24 Mar 2020 15:10 |
Last Modified: | 24 Mar 2020 15:10 |
Status: | Published |
Publisher: | AIP Publishing |
Refereed: | Yes |
Identification Number: | 10.1063/1.5140616 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:158626 |