Clarke, RG orcid.org/0000-0002-4400-8464, Shang, X, Ridler, NM et al. (3 more authors) (2020) An interlaboratory study of the reproducibility of on-wafer S-parameter measurements from 140 GHz to 220 GHz. In: Proceedings of the 94th ARFTG Microwave Measurement Symposium (ARFTG 2020). 94th ARFTG Microwave Measurement Symposium (ARFTG 2020), 26-29 Jan 2020, San Antonio, Texas, USA. IEEE ISBN 978-1-7281-2056-0
Abstract
The development, modelling and characterization of millimeter-wave semiconductor devices calls for accurate and reproducible on-wafer measurements. We report on an interlaboratory study involving on-wafer S-parameter measurements in the 140 GHz to 220 GHz band, conducted by three well-established measurement laboratories. The measurements can be used to form typical reproducibility limits for these measurements when conducted in different laboratories using different equipment and calibration methods.
Metadata
Item Type: | Proceedings Paper |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2020 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. Uploaded in accordance with the publisher's self-archiving policy. |
Keywords: | On-wafer measurement; co-planar waveguide; measurement repeatability; measurement reproducibility; measurement uncertainty |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds) |
Funding Information: | Funder Grant number European Association of National Metrology Institutes 14IND02 |
Depositing User: | Symplectic Publications |
Date Deposited: | 03 Feb 2020 12:54 |
Last Modified: | 08 Jun 2020 14:58 |
Status: | Published |
Publisher: | IEEE |
Identification Number: | 10.1109/ARFTG47584.2020.9071783 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:156339 |