Dong, Y, Liu, Y, Song, F et al. (2 more authors) (2016) Modeling and sliding-mode control of wafer stage in lithrography machines. In: Proceedings of the 2016 UKACC 11th International Conference on Control (CONTROL). 2016 UKACC 11th International Conference on Control (CONTROL), 31 Aug - 02 Sep 2016, Belfast, UK. IEEE ISBN 978-1-4673-9891-6
Abstract
Permanent magnet linear motors (PMLMs) are widely used in many high precision servo motion platforms, and lithography is a typical application. The reticle stage macro movement subsystem of a lithography machine is a 3-DOF coupling system in X-Y direction which requires carefully modelling and control to achieve high precision. This paper proposes a new modeling method for the 3-DOF PMLM driven coupling system. The modeling method considers the rotation angle of linear motors in X direction to solve the coupling problem and to achieve ultraprecision tracking performance with millimeter accuracy. Furthermore a 3-DOF sliding mode controller is designed to control the proposed model. Finally, the effectiveness of this modeling and control strategy is demonstrated via S-curve tracking simulation, and both the performance of the master-slave with feedforward control structure and the main-main with feedforward control structure are compared. The simulation results show that the tracking errors of PMLMs both in X and Y directions are less than 3 μm, and the rotation angle is less than 25 μrad.
Metadata
Item Type: | Proceedings Paper |
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Authors/Creators: |
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Keywords: | reticle stage; 3 DOF coupling model; sliding mode control |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Institute of Communication & Power Networks (Leeds) |
Depositing User: | Symplectic Publications |
Date Deposited: | 05 Nov 2019 15:00 |
Last Modified: | 05 Nov 2019 15:00 |
Status: | Published |
Publisher: | IEEE |
Identification Number: | 10.1109/control.2016.7737578 |
Related URLs: | |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:153032 |