Walther, T. orcid.org/0000-0003-3571-6263 (2003) Electron energy loss spectroscopic profiling of semiconductor hetero- and nano-structures: theory, implementation, applications. In: Cullis, A.G. and Midgley, P.A., (eds.) Microscopy of Semiconducting Materials 2003. Microscopy of Semiconducting Materials, 31 Mar - 03 Apr 2003, Cambridge, UK. CRC Press , pp. 27-32. ISBN 9781315895536
Abstract
The method of energy loss spectroscopic profiling (ELSP) in a transmission electron microscope is described, with emphasis on the implementation for a post-columnar energy filter and the optimisation of both energy and spatial resolution. Applications to thin film semiconductors (SiGe / Si, ZnMgSSe / ZnSe and Cd(Mn,Mg)Te / CdTe), to oxide layers (SrTiO3 / (La0.7Ca0.3)MnO3) and to nano-particles (LaPO4:Ce) demonstrate the potential of this technique for solving physical, chemical or technological problems related to diffusion and segregation of elements otherwise not readily accessible. Possible quantification procedures and recent results are presented.
Metadata
Item Type: | Proceedings Paper |
---|---|
Authors/Creators: |
|
Editors: |
|
Copyright, Publisher and Additional Information: | © 2003 CRC Press. |
Keywords: | ELS; Microscope; Diffusion; Lengths; Shifts |
Dates: |
|
Institution: | The University of Sheffield |
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) |
Depositing User: | Symplectic Sheffield |
Date Deposited: | 02 Nov 2018 12:37 |
Last Modified: | 19 Dec 2022 13:50 |
Status: | Published |
Publisher: | CRC Press |
Refereed: | Yes |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:137430 |