Rossall, Andrew K. orcid.org/0000-0002-0123-8163, van den Berg, Jaap A., Meehan, David et al. (2 more authors) (2019) Analysis of plasma enhanced pulsed laser deposition of transition metal oxide thin films using medium energy ion scattering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. pp. 274-278. ISSN 0168-583X
Abstract
In this study, plasma-enhanced pulsed laser deposition (PE-PLD), which is a novel variant of pulsed laser deposition that combines laser ablation of metal targets with an electrically-produced oxygen plasma background, has been used for the fabrication of ZnO and Cu2O thin films. Samples prepared using the PE-PLD process, with the aim of generating desirable properties for a range of electrical and optical applications, have been analysed using medium energy ion scattering. Using a 100 keV He+ ion beam, high resolution depth profiling of the films was performed with an analysis of the stoichiometry and interface abruptness of these novel materials. It was found that the PE-PLD process can create stoichiometric thin films, the uniformity of which can be controlled by varying the power of the inductively coupled plasma. This technique showed a high deposition rate of ∼0.1 nm s−1.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2018 Elsevier B.V. All rights reserved. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. |
Keywords: | Inductively coupled plasma,Medium energy ion scattering,Nano-layer profiling,Plasma-enhanced pulsed laser deposition,Thin film,Transition metal oxide |
Dates: |
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Institution: | The University of York |
Academic Units: | The University of York > Faculty of Sciences (York) > Physics (York) |
Funding Information: | Funder Grant number EPSRC EP/K018388/1 Unknown UNSPECIFIED |
Depositing User: | Pure (York) |
Date Deposited: | 28 Jun 2018 13:50 |
Last Modified: | 19 Feb 2025 00:08 |
Published Version: | https://doi.org/10.1016/j.nimb.2018.06.023 |
Status: | Published |
Refereed: | Yes |
Identification Number: | 10.1016/j.nimb.2018.06.023 |
Related URLs: | |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:132771 |
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