Suri, Ashish, Pratt, Andrew orcid.org/0000-0002-0795-2640, Tear, Steven Philip orcid.org/0000-0002-1535-1327 et al. (2 more authors) (2017) Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes. Journal of Physics: Conference Series. 012017. ISSN 1742-6596
Abstract
We report the design and experimental characterisation of a miniature detector for the scanning electron microscope based on the Bessel Box (BB) electron energy analyser which has a simple cylindrical geometry. We report on the simulation and operation of a prototype BB. The energy resolution of a single BB has been numerically calculated and experimentally characterised to be < 1%. This miniature electron detector is designed to be used close to the sample, alleviating the effects of the ambient electrostatic and magnetic fields.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Dates: |
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Institution: | The University of York |
Academic Units: | The University of York > Faculty of Sciences (York) > Physics (York) The University of York > Faculty of Sciences (York) > Electronic Engineering (York) |
Depositing User: | Pure (York) |
Date Deposited: | 23 Nov 2017 14:30 |
Last Modified: | 12 Jan 2025 00:05 |
Published Version: | https://doi.org/10.1088/1742-6596/902/1/012017 |
Status: | Published |
Refereed: | Yes |
Identification Number: | 10.1088/1742-6596/902/1/012017 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:124438 |
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Filename: Suri_2017_J._Phys._3A_Conf._Ser._902_012017.pdf
Description: Characterization of a Miniature Electron Energy Analyzer for Scanning Electron Microscopes
Licence: CC-BY 2.5