Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms

Doyle, Scott James, Lafleur, Trevor, Gibson, Andrew Robert orcid.org/0000-0002-1082-4359 et al. (3 more authors) (2017) Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms. Plasma sources science & technology. ISSN: 0963-0252

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Item Type: Article
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© IOP Publishing 2017. This is an author-produced version of the published paper. Uploaded in accordance with the publisher’s self-archiving policy. Further copying may not be permitted; contact the publisher for details
Dates:
  • Accepted: 30 October 2017
  • Published (online): 30 October 2017
  • Published: 16 November 2017
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 13 Nov 2017 09:20
Last Modified: 17 Sep 2025 00:39
Published Version: https://doi.org/10.1088/1361-6595/aa96e5
Status: Published
Refereed: Yes
Identification Number: 10.1088/1361-6595/aa96e5
Open Archives Initiative ID (OAI ID):

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