Steenson, DP, Mathisen, S, Doychinov, V et al. (3 more authors) (2017) UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. In: Proceedings of the 18th IEEE International Vacuum Electronic Conference (IVEC-2017), London. 18th IEEE International Vacuum Electronic Conference (IVEC-2017), London, 24-26 Apr 2017, London. Institute of Electrical and Electronics Engineers ISBN 978-1-5090-5916-4
Abstract
Abstract— Two advanced microfabrication processes based on ultraviolet photolithography (UV LIGA) to enable both fabrication and rapid, low cost prototyping of relatively high aspect ratio Slow Wave Structures (SWS) for sub-THz vacuum electron devices (VEDs) have been developed. One process is based on the use of a multi-layer SU-8 photoresist. The multi-layer approach ensures the planarity and the surface quality required to electroform the ground plane or for assembly surfaces. This also ensures low ohmic losses of the SWS. The second process is developed as metal-coated SU-8 process which can serve as a fast and low cost prototyping technique prior final robust realization of the structure in a full metal shape. The main steps of the two processes are here reported for the fabrication of the double corrugated waveguide at 0.3 THz. The combined approach of fast prototyping and microfabrication techniques proposed will enable fast, affordable and accurate fabrication of 3D SWSs for sub-THz VEDs.
Metadata
Item Type: | Proceedings Paper |
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Authors/Creators: |
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Keywords: | UV LIGA; Micromachined Vacuum Tubes; Double Corrugated Waveguide; vacuum electronic devices; Sub-THz components; rapid prototyping; Multilayer SU-8 |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds) |
Funding Information: | Funder Grant number EPSRC EP/M000419/1 Royal Society WLR/SUC8/RND7/1/LJC |
Depositing User: | Symplectic Publications |
Date Deposited: | 03 Nov 2017 15:33 |
Last Modified: | 28 Feb 2024 15:06 |
Published Version: | https://publications.hse.ru/en/books/205824095 |
Status: | Published |
Publisher: | Institute of Electrical and Electronics Engineers |
Identification Number: | 10.1109/ivec.2017.8289639 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:123431 |