Wang, X., Chauvat, M.P., Ruterana, P. et al. (1 more author) (2017) Effective absorption correction for energy dispersive X-ray mapping in a scanning transmission electron microscope: analyzing the local indium distribution in rough samples of InGaN alloy layers. Journal of Microscopy, 268 (3). pp. 248-253. ISSN 0022-2720
Abstract
We have applied our previous method of self-consistent k*-factors for absorption correction in energy-dispersive X-ray spectroscopy to quantify the indium content in X-ray maps of thick compound InGaN layers. The method allows us to quantify the indium concentration without measuring the sample thickness, density or beam current, and works even if there is a drastic local thickness change due to sample roughness or preferential thinning. The method is shown to select, point-by-point in a two-dimensional spectrum image or map, the k*-factor from the local Ga K/L intensity ratio that is most appropriate for the corresponding sample geometry, demonstrating it is not the sample thickness measured along the electron beam direction but the optical path length the X-rays have to travel through the sample that is relevant for the absorption correction.
Metadata
Item Type: | Article |
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Authors/Creators: |
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Copyright, Publisher and Additional Information: | © 2017 The Authors / Royal Microscopical Society This is an author produced version of a paper subsequently published in Journal of Microscopy. Uploaded in accordance with the publisher's self-archiving policy. |
Keywords: | Absorption correction; energy-dispersive X-ray spectroscopy (EDXS); indium gallium nitride (InGaN); islanding; transmission electron microscopy (TEM); X-ray microanalysis |
Dates: |
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Institution: | The University of Sheffield |
Academic Units: | The University of Sheffield > Faculty of Engineering (Sheffield) > Department of Electronic and Electrical Engineering (Sheffield) |
Depositing User: | Symplectic Sheffield |
Date Deposited: | 07 Sep 2017 12:40 |
Last Modified: | 28 Sep 2018 00:38 |
Published Version: | https://doi.org/10.1111/jmi.102643 |
Status: | Published |
Publisher: | Wiley |
Refereed: | Yes |
Identification Number: | 10.1111/jmi.102643 |
Open Archives Initiative ID (OAI ID): | oai:eprints.whiterose.ac.uk:120927 |