Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

Tsutsumi, Takayoshi, Greb, Arthur, Gibson, Andrew Robert orcid.org/0000-0002-1082-4359 et al. (3 more authors) (2017) Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials. Journal of Applied Physics. p. 143301. ISSN 1089-7550

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Item Type: Article
Authors/Creators:
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© 2017 The Author(s).
Dates:
  • Published: 10 April 2017
  • Accepted: 24 March 2017
Institution: The University of York
Academic Units: The University of York > Faculty of Sciences (York) > Physics (York)
Depositing User: Pure (York)
Date Deposited: 12 Apr 2017 15:00
Last Modified: 28 Nov 2024 00:24
Published Version: https://doi.org/10.1063/1.4979855
Status: Published
Refereed: Yes
Identification Number: 10.1063/1.4979855
Open Archives Initiative ID (OAI ID):

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