Shafique, MF, Steenson, DP and Robertson, ID (2015) Fabrication of Microstructures in LTCC Technology Using Selective Laser Ablation. IEEE Transactions on Components, Packaging, and Manufacturing Technology, 5 (6). pp. 845-851. ISSN 2156-3950
Abstract
This paper presents a technique and initial conditions for the laser ablation of microstructures in a low temperature co-fired ceramic (LTCC) technology. It is demonstrated that 2.5-D microstructures can be realized cost effectively and precisely by deploying the proposed technique in which an infrared laser is used to carefully ablate portions of unfired LTCC green tape. A demonstration prototype consisting of three gears and their mounting platform is realized along with a detailed description of the attendant micromachining process. The ablated surface is examined using a scanning electron microscope and a surface profiler. The optimization of the laser parameters required to equalize the surface roughness of the ablated material to that of an unmachined LTCC substrate is also described.
Metadata
Authors/Creators: |
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Keywords: | Ceramic microelectromechanical systems (MEMS); laser machining; low temperature co-fired ceramic (LTCC); sensors and actuators; thick-film technology |
Dates: |
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Institution: | The University of Leeds |
Academic Units: | The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds) |
Depositing User: | Symplectic Publications |
Date Deposited: | 20 May 2016 13:56 |
Last Modified: | 22 May 2016 19:18 |
Published Version: | http://dx.doi.org/10.1109/TCPMT.2015.2426720 |
Status: | Published |
Publisher: | Institute of Electrical and Electronics Engineers (IEEE) |
Identification Number: | https://doi.org/10.1109/TCPMT.2015.2426720 |
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