Fabrication of Microstructures in LTCC Technology Using Selective Laser Ablation

Shafique, MF, Steenson, DP and Robertson, ID (2015) Fabrication of Microstructures in LTCC Technology Using Selective Laser Ablation. IEEE Transactions on Components, Packaging, and Manufacturing Technology, 5 (6). pp. 845-851. ISSN 2156-3950

Abstract

Metadata

Authors/Creators:
  • Shafique, MF
  • Steenson, DP
  • Robertson, ID
Keywords: Ceramic microelectromechanical systems (MEMS); laser machining; low temperature co-fired ceramic (LTCC); sensors and actuators; thick-film technology
Dates:
  • Published: June 2015
  • Accepted: 15 April 2015
  • Published (online): 14 May 2015
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 20 May 2016 13:56
Last Modified: 22 May 2016 19:18
Published Version: http://dx.doi.org/10.1109/TCPMT.2015.2426720
Status: Published
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Identification Number: https://doi.org/10.1109/TCPMT.2015.2426720
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