Monocrystalline-Silicon Microwave MEMS

Oberhammer, J, Shah, U, Baghchehsaraei, Z et al. (4 more authors) (2013) Monocrystalline-Silicon Microwave MEMS. In: UNSPECIFIED Progress in Electromagnetics Research Symposium PIERS 2013, 12 - 15 Aug 2013, Stockholm, Sweden. The Electromagnetics Academy , 1933 - 1941.

Abstract

Metadata

Authors/Creators:
  • Oberhammer, J
  • Shah, U
  • Baghchehsaraei, Z
  • Töpfer, F
  • Chekurov, N
  • Sterner, S
  • Somjit, N
Dates:
  • Published: 15 August 2013
Institution: The University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering & Physical Sciences (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Pollard Institute (Leeds)
Depositing User: Symplectic Publications
Date Deposited: 23 Oct 2014 11:42
Last Modified: 03 Nov 2016 02:38
Published Version: http://www.piers.org/piersproceedings/piers2013Sto...
Status: Published
Publisher: The Electromagnetics Academy

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